FAURE QEI : an overview SEMI Networking Breakfast - March, the 19th. Eric CHEVREAU Managing Director

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1 FAURE QEI : an overview SEMI Networking Breakfast - March, the 19th Eric CHEVREAU Managing Director

2 OVERVIEW Key Informations Knowhow & Services Few references Memo

3 KEY INFORMATIONS CORE BUSINESS More than 18 years experience in the engineering of clean rooms and controlled environments : design, construction, reception Historical knowhow developed for the microelectronic industry, within the Grenoble region (CEA, SOITEC, STM, 40-30, ) High added-value engineering relative to ultra-clean industrial environments and numerous scientific & biotech research lab. Expertise ensured through : Engineering & project management skilled workforce Laboratory activities : clean room analysis and qualification R&D continuous investment in Air Quality Improvement and Energy consumption reduction ORGANIZATION Holding (ATR Partners) 25% - FSI Région 75% - Familiale BUSINESS SEGMENTS Micro and nanotechnologies, photovoltaic Pharmaceutical and biotech industries Research laboratories and L2/L3 biological containment labs Nuclear technology (shielded cells, nuclear waste storage, ) Health (operating block, ) Optical Space-industry - Avionic Simulation des risques industriels Ingénierie des équipements industriels Ingénierie des procédés industriels LOCATION Ile de France Chatenay X X Rhône Villeurbanne XX X XX Isère Meylan & Crolles XX Vallée du Rhône Codolet X Sud-Est St Paul Les Durance X X Aquitaine Le Barp X X Contact R. Artur E. Chevreau S. Tholance 3

4 KNOWHOW & SERVICES : Engineering (70% of our activity) ENGINEERING SERVICES Clean rooms turnkey realisation Global engineering missions from definition of user requirements to acceptance tests Conception and post-contract studies TECHNICAL ASSISTANCE Feasibility study, risks analysis User requirement definition, Tool Utilities Matrix Simulation / Modelling Technical and financial feasibility studies Energy consumption audit Air quality and HVAC system audit OUR KEY COMPETENCES HVAC design and optimization Process Fluids & Gas : production, distribution Special fluids and gas ; gas detection ; fire safety Exhaust, contaminated gas & fluids collect, analysis and evacuation Electricity, instrumentation & regulation, monitoring Hook-up (process tools implementation) Contamination monitoring, Nanoparticles containment Noise and micro-vibration reduction Electromagnetic compatibility Audit and study for energy consumption reduction AUDIT & TRAINING Clean concept audit and customer-adapted training 4

5 KNOWHOW & SERVICES : Control and Qualification Laboratory (20% of our activity) Laboratory Analyses and Measurements Certification of clean rooms according to ISO14644 standard Particular counting Tests of filters integrity Climatic parameters control in clean room Air condition controls: Three-dimensional measure of airflow SF 6 tracing Generation of non contaminant aerosol Microbiological analyses: Microbiological control of water, air and surfaces Research of legionella pneumophila Volatile organic compounds VOCs analyses: Eole partnership (Tera Environnement and Balazs Air Liquide) Installations qualification Pharmaceutical protocols CQ, IQ, OQ, PQ Commissioning Risks analyses (AMDEC/FMEA) Expertise / Audit / Training Contamination expertise (sources research and improvement) Airflow modelling Realization of emissions tests in our clean room Clean concept Audit and training Metrology / Calibration Sensors calibration in our laboratory and on sites : Temperature, humidity, pressure, velocity, Uncertainty calculation Global acquisition-chain control 5

6 KNOWHOW & SERVICES : Research and Development (10% of our activity) FAURE QEI OBJECTIVES To design the next and innovative generation of HVAC systems and controlled environments To keep a leading position in Air Quality Improvement and Energy Optimization MAIN DEVELOPMENT AXIS Interior Environment Quality (IEQ) Air treatment studies Nanoparticles containment Optimization of energy consumption CIR AGREEMENT The agreement for French Research Tax Credit was granted to Faure QEI in 2011 for 3 years ACTUAL PROJECTS VAICTEUR AIR2 (Oseo and Ademe) COLLECTAIR (Lyonbiopole) Thesis : Radioactive aerosols concentrations control in nuclear medicine dept OUR PARTNERS 6

7 FEW REFERENCES : Micro, Photo & NanoElectronic CEA LETI Grenoble 2009 LBB (funiculaire blanc), B2I (Industries Intégratives), PUMA (Ines au Bourget) Conception, MOE et Clefs en main Travaux > 18 millions Salles propres, accostage gares, SCI CLEANSPACE - Montmélian Aménagement locatif de salles propres MOE complète ; définition des besoins 1500m² de salles propres ISO 6 à 8 Georgia Tech Metz Institut Lafayette Centre R&D matériaux micro-élect Clef En Main ; BET CVC, Elec, SSI 600m² labo m² salles ISO 5 à 7 Lot fluides et gaz spéciaux complexe CEA Grenoble NANOBIO Pôle technologique biologie et santé MOE loi MOP complète 1500m² labos (dont L2), salles propres et locaux techniques SOLOREM Nancy Institut Jean Lamour Centre R&D regroupant 5 labos CNRS matériaux/surface/minéraux micro-élec. Clef En Main ; BET macro-lot SB 1300m² de salles propres ISO 5 à 7 SOITEC Bernin Corsica Ligne pilote au B3 pour applications LED et CPV MOE, AMOA et Hook-Up 2000m² de salles propres ISO 4 à 8 STMicroelectronics - Rousset Aménagement Fab 8 pouces AMOA HVAC, fluides et gaz 500 m² de salles propres ISO 6 et 7 PV Alliance CEA Grenoble 2010 Installation de SP dans bâtiment existant LAB-FAB Hétérojonction Etude de concept 2600 m² de salles propres 7

8 FAURE QEI MEMO Expertise : clean-room design, contamination managment, energy consumption High-skilled engineering competences Microelectronic-process knowledge & experience Synergy between Design Office, Lab. and R&D Dpt. Ability to define and detail with you your needs ; then to design and adapt your process environment accordingly : «neither too much, nor too little» Devlpt. stages anticipation : start-up / industrial ramp-up / mass-production & OPEX All-in-one solutions / quick ability to react / Customer oriented FAURE QEI - 27 boulevard des Alpes MEYLAN Tél Fax contact@faure-qei.com 8

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